Semiconductor device and method for manufacturing same

ABSTRACT

A falling off of a through electrode is inhibited without decreasing a reliability of a semiconductor device including a through electrode. A semiconductor device  100  includes: a silicon substrate  101 ; a through electrode  129  extending through the silicon substrate  101 ; and a first insulating ring  130  provided in a circumference of a side surface of the through electrode  129  and extending through the semiconductor substrate  101 . In addition, the semiconductor device  100  also includes a protruding portion  146 , being provided at least in the vicinity of a back surface of a device-forming surface of the semiconductor substrate  101  so as to contact with the through electrode  129 , and protruding in a direction along the surface of the semiconductor substrate  101  toward an interior of the through electrode  129.

This application is based on Japanese patent application No.2005-284,248, the content of which is incorporated hereinto byreference.

BACKGROUND

1. Technical Field

The present invention relates to a semiconductor device and a method formanufacturing thereof.

2. Related Art

In recent years, lighter, more compact and more sophisticatedsemiconductor devices are generally required in the industry, a denseinstallation of interconnects, a miniaturization of a logical device andan increased capacity of a memory are proceeded in semiconductor devicessuch as a multi-chip package.

A solution for such requirements is an attempt for achieving a denseinstallation of interconnects by providing a through electrode in asemiconductor substrate. Typical conventional through electrode isdescribed in Japanese Patent Laid-Open No. S60-140,850 (1985). A deviceis described in Japanese Patent Laid-Open No. S60-140,850, in which anaperture is provided in a substrate, and a back surface bump forcontacting with a through electrode is provided in the aperture in thelower portion of the through electrode composed of a polycrystallinesilicon film.

SUMMARY OF THE INVENTION

In the meantime, the present inventors have investigated a semiconductordevice having a through electrode, and found that, in the side of theback surface of the semiconductor substrate, a through electrode mayoften fall off from the inside of the semiconductor substrate andeventually dropped off therefrom. Therefore, further investigations havebeen eagerly conducted for the purpose of preventing the throughelectrode from falling off from the substrate.

Here, a possible solution for inhibiting the falling off of the throughelectrode may be an extension of the through electrode across adevice-forming surface of the semiconductor substrate. This solutioncorresponds to a configuration described in Japanese Patent Laid-OpenNo. S60-140,850. Nevertheless, according to the configuration describedin the above-described Japanese Patent Laid-Open No. S60-140,850, alarger aperture for forming a bump is additionally provided in aperiphery of the through electrode. Consequently, it is difficult toachieve closely packing of the through electrodes.

Further, a polycrystalline silicon film composing the through electrodeis formed over a device-forming surface in the technology described inJapanese Patent Laid-Open No. S60-140,850, an operation for forming thethrough electrode from the side of the device-forming surface isrequired. In such case, when a procedure of forming the throughelectrode before forming the device is employed, better heat resistanceis required for a material for forming the electrode, and thus a rangeof choice for the electrode material may often be limited. Further, whena procedure of forming the through electrode after forming the device isemployed, there is a concern that a reliability of the device isreduced. Further, when the silicon is etched from the back surfacethereof or when a bump is formed in the back surface thereof, an issueof a metal contamination is caused, and this may lead to a deteriorationof the performance of the device.

According to one aspect of the present invention, there is provided asemiconductor device, comprising: a semiconductor substrate, a throughelectrode extending through the semiconductor substrate; an annularcylindrical insulating film, being provided in a circumference of a sidesurface of the through electrode and extending through the semiconductorsubstrate; and a protruding portion, being provided at least in thevicinity of a back surface of a device-forming surface of thesemiconductor substrate so as to contact with the through electrode, andprotruding in a direction along the surface of the semiconductorsubstrate toward an interior of the through electrode.

In the semiconductor device according to the above-described aspect ofthe present invention, the protruding portion protruding in thedirection along the surface of the semiconductor substrate toward theinterior of the through electrode is provided in the vicinity of theback surface of the semiconductor substrate, and the protruding portionis in contact with the through electrode. Consequently, the throughelectrode is supported by the protruding portion in the side of the backsurface of the semiconductor substrate, so that the falling off of thethrough electrode from the substrate can be avoided. Further, thesemiconductor device according to the above-described aspect of thepresent invention is configured to be provided with the throughelectrode, which can be manufactured from the side of the back surface.Consequently, according to the aspect of the present invention, afalling off of the through electrode from the side of the back surfacecan be effectively prevented without decreasing a reliability of thesemiconductor device.

In addition, since the annular cylindrical insulating film is providedin the periphery of the through electrode in the semiconductor deviceaccording to the above-described aspect of the present invention, anelectrical insulation can be provided in the periphery of the throughelectrode and a parasitic capacitance can be reduced. In addition, sincethe electrical insulation is ensured in the periphery of the throughelectrode, a closely packing of the through electrodes can be achieved.

According to another aspect of the present invention, there is provideda method for manufacturing a semiconductor device, comprising: formingan annular cylindrical insulating film, by selectively removing thesemiconductor substrate from a side of a device-forming surface of thesemiconductor substrate to form an annular cylindrical concave portion,then filling an insulating film in an interior of the annularcylindrical concave portion and removing portions of the insulating filmlocated outside of the annular cylindrical concave portion; forming apredetermined semiconductor device in the device-forming surface;reducing a thickness of the semiconductor substrate from a reverse sideof the device-forming surface, after the forming the semiconductordevice; providing an aperture, by providing a back surface insulatingfilm on the back surface and selectively removing a predetermined regionof the back surface insulating film, after the reducing the thickness ofthe semiconductor substrate; forming a hole and forming a protrudingportion, by selectively removing a predetermined region of thesemiconductor substrate remaining in the inside of the annularcylindrical insulating film through a mask of the aperture from side ofthe back surface to form the hole, and utilizing a portion of the backsurface insulating film that protrudes in a direction along the surfaceof the semiconductor substrate as the protruding portion, the holeincluding a region having larger diameter than the diameter of theaperture and extending through the semiconductor substrate; and forminga through electrode by growing an electroconductive film so as to fillthe hole therewith, the through electrode extending through thesemiconductor substrate and contacting with the protruding portion.

Since the through electrode is formed from the side of the back surfaceof the semiconductor substrate according to the aspect of the presentinvention, a deterioration of the semiconductor device formed on thedevice-forming surface can be inhibited. In addition, the protrudingportion is provided and the through electrode contacting with theprotruding portion is formed in the side of the back surface of thesemiconductor substrate. Consequently, a stable manufacture of thesemiconductor device configured to provide a prevention from a fallingoff of the electrode from the side of the back surface can be achievedwith an improved production yield.

As described above, according to the present invention, a falling off ofthe through electrode can be inhibited without decreasing performancesand/or a reliability of the semiconductor device having the throughelectrode, by providing the protruding portion that is in contact withthe through electrode in the vicinity of the back surface thesemiconductor substrate.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other objects, advantages and features of the presentinvention will be more apparent from the following description taken inconjunction with the accompanying drawings, in which:

FIG. 1 is a cross-sectional view, illustrating a configuration of asemiconductor device according to an embodiment;

FIG. 2 is a cross-sectional view, illustrating a configuration of asemiconductor device according to an embodiment;

FIG. 3 is a cross-sectional view, illustrating a configuration of asemiconductor device according to an embodiment;

FIG. 4 is a cross-sectional view, illustrating a configuration of asemiconductor device according to an embodiment;

FIG. 5 is a cross-sectional view, illustrating a configuration of asemiconductor device according to an embodiment;

FIG. 6 is a cross-sectional view, illustrating a configuration of asemiconductor device according to an embodiment;

FIG. 7 is a cross-sectional view, illustrating a configuration of asemiconductor device according to an embodiment;

FIG. 8 is a cross-sectional view, illustrating a configuration of asemiconductor device according to an embodiment;

FIGS. 9A and 9B are cross-sectional views, illustrating a process formanufacturing the semiconductor device according to the embodiment;

FIG. 10 a plan view, illustrating the configuration of the semiconductordevice according to the embodiment;

FIGS. 11A and 11B are cross-sectional views, illustrating a process formanufacturing the semiconductor device according to the embodiment;

FIGS. 12A and 12B are cross-sectional views, illustrating a process formanufacturing the semiconductor device according to the embodiment;

FIGS. 13A and 13B are cross-sectional views, illustrating a process formanufacturing the semiconductor device according to the embodiment;

FIGS. 14A and 14B are cross-sectional views, illustrating a process formanufacturing the semiconductor device according to the embodiment;

FIGS. 15A and 15B are cross-sectional views, illustrating a process formanufacturing the semiconductor device according to the embodiment;

FIG. 16 a plan view, illustrating a configuration of the semiconductordevice according to the embodiment;

FIG. 17 is a cross-sectional view, illustrating a configuration of asemiconductor device according to an embodiment;

FIG. 18 is a cross-sectional view, illustrating a configuration of asemiconductor device according to an embodiment;

FIG. 19 is a cross-sectional view, illustrating a configuration of asemiconductor device according to an embodiment;

FIG. 20 is a plan view, illustrating the configuration of thesemiconductor device according to the embodiment;

FIG. 21 is a plan view, illustrating a configuration of a semiconductordevice according to the embodiment;

FIG. 22 is a plan view, illustrating a configuration of a semiconductordevice according to the embodiment;

FIG. 23 is a plan view, illustrating a configuration of a semiconductordevice according to the embodiment;

FIG. 24 is a cross-sectional view, illustrating a configuration of asemiconductor device according to the embodiment;

FIG. 25 is a cross-sectional view, illustrating a configuration of asemiconductor device according to the embodiment;

FIG. 26 is a cross-sectional view, illustrating a configuration of asemiconductor device according to the embodiment;

FIG. 27 is a plan view, illustrating a configuration of a semiconductordevice according to the embodiment;

FIG. 28 is a cross-sectional view, illustrating a configuration of asemiconductor device according to the embodiment; and

FIG. 29 is a cross-sectional view, illustrating a configuration of asemiconductor device according to the embodiment.

DETAILED DESCRIPTION

The invention will be now described herein with reference toillustrative embodiments. Those skilled in the art will recognize thatmany alternative embodiments can be accomplished using the teachings ofthe present invention and that the invention is not limited to theembodiments illustrated for explanatory purposed.

Preferable embodiments according to the present invention will bedescribed as follows in further detail, in reference to the annexedfigures. In all figures, identical numeral is assigned to an elementcommonly appeared in the figures, and the detailed description thereofwill not be presented.

FIRST EMBODIMENT

FIG. 1 is a cross-sectional view, illustrating a configuration of asemiconductor device of the present embodiment. A semiconductor device100 shown in FIG. 1 includes: a semiconductor substrate (siliconsubstrate 101); a through electrode 129 extending through the siliconsubstrate 101; an annular cylindrical insulating film (first insulatingring 130) provided in a circumference of a side surface of the throughelectrode 129 and extending through the semiconductor substrate 101; anda protruding portion 146, being provided at least in the vicinity of aback surface of a device-forming surface of the semiconductor substrate101 so as to contact with the through electrode 129, and protruding in adirection along the surface of the semiconductor substrate 101 toward aninterior of the through electrode 129. The semiconductor device 100further includes a back surface insulating film 139 provided so as tocontact with the back surface of the silicon substrate 101.

The protruding portion 146 is an annular cylindrical portion, which isprovided in the reverse side of the device-forming surface so as tosurround the through electrode 129. The protruding portion 146 iscomposed of a silicon substrate remaining portion 127 and a portion ofthe back surface insulating film 139. The protruding portion 146includes a tapered surface 145 and a tapered surface 128, and thus has ageometry, in which a diameter thereof is increased from the back surfaceof the semiconductor device 100 toward the interior of the siliconsubstrate 101.

The back surface insulating film 139 composes at least a part of theprotruding portion 146. More specifically, a portion of the protrudingportion 146 is composed of an insulating material. The back surfaceinsulating film 139 is provided so as to protrude from the inner sidesurface of the first insulating ring 130 toward the inside of thethrough electrode 129, and such protruded component composes theprotruding portion 146. On the other hand, the back surface insulatingfilm 139 has an aperture of a smaller diameter than a diameter of thethrough electrode 129, and a side surface of the aperture forms thetapered surface 145.

In the semiconductor device 100, a predetermined region of the siliconsubstrate 101 is removed, and the predetermined removed region isprovided with a first insulating ring 130 and a through electrode 129,and a region formed of a remained portion of the silicon substrate 101is provided between a region for forming the annular cylindricalinsulating film 130 and a region for forming the through electrode 129.The semiconductor device 100, more specifically, includes a siliconsubstrate remaining portion 127 and a silicon substrate remainingportion 147 as the regions composed of the remained silicon substrate101. In other words, the silicon substrate remaining portion 127 iscomposed of the same material as the silicon substrate 101.

In regions of the semiconductor device 100 except the region for formingthe silicon substrate remaining portion 127 and the region for formingthe silicon substrate remaining portion 147, the side surface of thethrough electrode 129 is in contact with the inner side surface of thefirst insulating ring 130.

The silicon substrate remaining portion 127 is a circular ring-shapedregion, in which an inner diameter thereof is increased from the side ofthe back surface of the silicon substrate 101 toward the side of thedevice-forming surface thereof, and thus has a tapered surface 128. Atleast a portion of the protruding portion 146 is composed of the siliconsubstrate remaining portion 127, which is a region composed of theremained portion of the silicon substrate 101.

The silicon substrate remaining portion 147 has a geometry, in which aninner diameter thereof is increased from the device-forming surfacetoward the side of the back surface thereof, and thus has a taperedsurface 148. The silicon substrate remaining portion 147 forms anotherprotruding portion, in addition to the protruding portion 146 providedin the side of the back surface of the silicon substrate 101. Invicinity of the device-forming surface of the silicon substrate 101, thethrough electrode 129 has a diameter decreasing (inversely tapered)toward the device-forming surface. Further, in the vicinity of the backsurface of the silicon substrate 101, the through electrode 129 has adiameter increasing (tapered) toward the device-forming surface.

The first insulating ring 130 includes a plurality of insulating filmsdeposited to form concentric cylinders (SiN film 131, SiO₂ film 133 andSiN film 135). While the simplest constitution of the insulating film isa dual-layer structure composed of the SiO₂ films 133, an additionalbarrier film for preventing a diffusion of a metal into a compound suchas SiN, SiCN and the like may be further included to provide a betterperformance, since the constitution including the additional barrierfilm can prevent the device from being deteriorated due to acontamination of metal.

In addition, the first insulating ring 130 may at least includeinsulating films disposed in both of the inside of the ring (side ofthrough electrode 129) and the outside thereof (side of siliconsubstrate 101), and for example, as illustrated in eighth embodiment, aportion of an electroconductive film may be included in the insidethereof.

Film thickness of the whole of the first insulating ring 130 in adirection along the surface of the substrate is presented as, forexample, about 2 to 5 μm. Having such configuration, characteristics forfilling in the process for forming the first insulating ring 130 can befurther improved.

Further, in the semiconductor device 100, a SiN film 103, an insulatinginterlayer 105 and an insulating interlayer 137 are formed in thissequence on the device-forming forming surface of the silicon substrate101. The through electrode 129 is coupled to a plurality of throughelectrode connecting plugs 117, which extend through the insulatinginterlayer 105 and the SiN film 103.

A back surface bump 142 is provided on the reverse side of thedevice-forming surface so as to contact with the through electrode 129.The back surface bump 142 is configured to be housed within a spacedefined by inner side of the outer side surface of the first insulatingring 130, or in other words within a space defined by the side of thethrough electrode 129 of the outer side surface of the first insulatingring 130.

Further, the device-forming surface of the silicon substrate 101 isprovided with a predetermined device such as a transistor including adiffusion layer 107 and a gate electrode 111 formed thereon. A deviceisolation region 109 is provided in the lateral side of the transistorto provide an isolation thereof from other devices.

Further, transistor connecting plugs 113 and through electrodeconnecting plugs 117 extend through the SiN film 103 and the insulatinginterlayer 105. The transistor connecting plugs 113 couple the diffusionlayer 107 with the interconnects 115 provided on the insulatinginterlayer 105. Similarly, the through electrode connecting plugs 117couple the through electrode 129 with an interconnect 119 on theinsulating interlayer 105.

The interconnects 115 and the interconnect 119 are located in the samelevel, and both are primary interconnects in FIG. 1. The interconnects115 and the interconnect 119 are embedded within the insulatinginterlayer 137.

A connecting plug 121, an electrode pad 123 and a bump 125 are providedon the interconnect 119 in this sequence. A plurality of throughelectrode connecting plugs 117 are provided so as to contact with onethrough electrode 129. The back surface bump 142 is coupled to the bump125 through the through electrode 129 and a plurality of throughelectrode connecting plugs 117. This configuration further ensures anelectrical conduction between one and the other surfaces of the siliconsubstrate 101.

Next, a process for manufacturing the semiconductor device 100 will bedescribed. The manufacturing process includes the following steps of:

forming an annular cylindrical insulating film 130, by selectivelyremoving the silicon substrate 101 from a side of a device-formingsurface of the silicon substrate 101 to form an annular cylindricalconcave portion, then filling an insulating film in an interior of theannular cylindrical concave portion and removing portions of theinsulating film located outside of the annular cylindrical concaveportion;

forming a predetermined semiconductor device in the device-formingsurface;

reducing a thickness of the silicon substrate 101 from the back surfacethereof, after the step of forming the semiconductor device;

providing an aperture 187 (FIG. 13A), by providing the back surfaceinsulating film 139 on the back surface and selectively removing apredetermined region of the back surface insulating film 139, after thestep of reducing the thickness of the silicon substrate 101;

forming a hole (through hole 193 shown in FIG. 13B) and forming aprotruding portion 146, by selectively removing a predetermined regionof the silicon substrate 101 remaining in the inside of the firstinsulating ring 130 through the aperture 187 of the back surfaceinsulating film 139 as a mask from side of the back surface to form thehole (through hole 193 shown in FIG. 13B), and utilizing a portion ofthe back surface insulating film 139 that protrudes in a direction alongthe surface of the silicon substrate 101 as the protruding portion 146,the hole including a region having larger diameter than the diameter ofthe aperture 187 and extending through the silicon substrate 101; and

forming the through electrode 129 by growing an electroconductive filmsuch as a metallic film and the like so as to fill the through hole 193therewith, the through electrode 129 extending through the siliconsubstrate 101 and contacting with the protruding portion 146.

The back surface of the annular cylindrical insulating film is exposedby conducting the operation for reducing the step of thickness of thesilicon substrate 101 from the back surface thereof.

In the steps of forming the through hole 193 and forming a protrudingportion 146 by utilizing a portion of the back surface insulating film139, a portion of the silicon substrate 101 is remained in the inside ofthe first insulating ring 130 in the vicinity of the back surface of thesilicon substrate 101.

A photopolymer film (photosensitive epoxy resin film 185 in FIG. 13A),for example, is formed for serving as the back surface insulating film139.

The step of forming the through electrode 129 includes an step ofgrowing a metallic film (copper (Cu) film 195 in FIG. 15A) in theinterior of the through hole 193 from the side of the device-formingsurface via an electroless plating process.

Further, the step of forming the through electrode 129 includes growingthe Cu film 195 from the interior to the outside of the through hole193, and then removing portions of the Cu film 195 formed outside ofthrough hole 193 to be planarized, and the process for manufacturing thesemiconductor device 100 further includes forming the back surface bump142 by growing another metallic film (nickel (Ni) film 141, gold (Au)film 143) from an exposed surface of the Cu film 195 in the side of theback surface via an electroless plating process, after the operation forforming the through electrode 129.

The process for manufacturing the semiconductor device 100 will befurther described in detail in reference to FIG. 9A to FIG. 15B. FIGS.9A and 9B and FIG. 11A to FIG. 15B are cross-sectional views,illustrating a process for manufacturing the semiconductor device 100.FIG. 10 is a diagram, useful in describing a geometry of the firstinsulating ring 130.

First of all, as shown in FIG. 9A, a patterned resist having annularcylindrical apertures (not shown) corresponding to the geometry of thefirst insulating ring 130 is formed on a surface serving as adevice-forming surface of the silicon substrate 101 by employing alithographic technology. The silicon substrate 101 is dry etched througha mask of such resist film to form annular cylindrical concave portionscorresponding to the geometry of the first insulating ring 130. In thiscase, a depth of the concave portion is appropriately selected, and maybe, for example, from 20 μm or more and 200 μm or less.

After the resist film is removed, an SiN film 161 and an SiO₂ film 133are deposited on the silicon substrate 101 in this sequence (FIG. 9A).The thickness of the SiN film 161 may be selected as, for example, 100nm. In addition, the SiO₂ film 133 may be composed of, for example, aborophosphosilicate glass (BPSG) film obtained by a chemical vapordeposition (CVD) process. Then, portions of the SiO₂ film 133 depositedin regions except the cylindrical concave portion are remove via achemical mechanical polishing (CMP) process (FIG. 9B). In addition toabove, FIG. 9B further illustrates a condition, where the portions ofthe SiN film 161 deposited in regions except the concave portion arefurther removed.

FIG. 10 is a plan view of the first insulating ring 130 shown in FIG. 9Bviewed from the upper direction. FIG. 10 corresponds to atwo-dimensional geometry of the first insulating ring 130. As shown inFIG. 9B and FIG. 10, the SiO₂ film 133 is a multi-layered film composedof the SiO₂ film 165 and the SiO₂ film 167. In addition, a combinationof the SiN film 131 and the SiN film 135 shown in FIG. 10 is the SiNfilm 161 shown in FIG. 9B.

Next, as shown in FIG. 11A, the device isolation region 109, thediffusion layer 107 and the gate electrode 111 are respectively formedon the device-forming surface of the silicon substrate 101. The deviceisolation region 109 may be configured of, for example, shallow trenchisolation (STI). In addition, the SiN film 103 and the insulatinginterlayer 105 are provided on the silicon substrate 101 in thissequence.

Subsequently, portions of the insulating interlayer 105 and the SiN film103 are selectively removed to form a hole penetrating these insulatingfilms. After an electroconductive film is embedded within the interiorof the hole, portions of the electroconductive film formed outside ofthe hole are removed to form the transistor connecting plugs 113 and thethrough electrode connecting plugs 117. Materials for composing thetransistor connecting plug 113 and the through electrode connecting plug117 may be, tungsten (W), for example.

Further, as shown in FIG. 11B, the interconnects 115 coupled to thetransistor connecting plugs 113 and the interconnect 119 coupled to thethrough electrode connecting plugs 117 are respectively formed on theinsulating interlayer 105.

Then, the insulating interlayer 137 is formed over the interconnects 115and the interconnect 119. Further, the electrode pad 123 and the bump125 for connecting to the interconnect 119 are formed in this sequence.Materials for forming the electrode pad 123 may be, for example,aluminum (Al), copper (Cu), nickel (Ni) or titanium nitride (TiN). Inaddition, material of forming the bump 125 may be, for example, gold(Au) or solder.

In addition to above, in the present embodiment and the followingembodiments, a predetermined number of upper layers such as interconnectlayers may be formed above the interconnect 119, and then, the electrodepad 123 and the bump 125 may be formed. More specifically,multiple-layered interconnect structure may be formed in the insulatinginterlayer 137.

Then, a cohesive agent layer 179 is formed on the device-formingsurface, and then a support 181 is affixed thereon. The cohesive agentlayer 179 may be made of, for example, an adhesive tape. Typicaladhesive tape is composed of a base member and adhesion layers formed onthe both sides of the base member. The base member composing theadhesive tape may be made of, for example, a polyolefin-type resin, apolyester-type resin or the like. In addition, the cohesive agentcomposing the adhesive tape may be made of, for example, an acrylic-typeemulsion cohesive agent, an acrylic-type solvent cohesive agent, anurethane-type cohesive agent or the like. In addition, materials forforming the support 181 may include, for example, quartz or a glass suchas PYREX (registered trademark) and the like. This can fully ensureresistances to heat, chemical agent, external force or the like thatwill be required in the process for reducing the thickness of thesilicon substrate 101 via a back surface grinding, which will bediscussed later. Alternatively, any material except glass may also beemployed, if the material exhibits such resistances. For example,plastic materials such as acrylic resin and the like may alternativelybe employed.

Then, the back surface grinding for the silicon substrate 101 is carriedout. The back surface grinding process is conducted by a mechanicalpolishing process. The thickness of the ground silicon substrate 101 maybe, for example, about 50 to 500 μm. Such thickness provides an exposureof the bottom surface of the SiO₂ film 133 from the back surface, anddividing the SiN film 161 into the SiN film 131 and the SiN film 135.Such process eventually provides the first insulating ring 130.

Next, as shown in FIG. 12A, portions of the silicon substrate 101 in theregion for forming the through electrode 129 are removed. In this case,in the region for forming the through electrode 129, or morespecifically in the region inside of the first insulating ring 130, thesilicon substrate remaining portion 127 is formed in the vicinity of theback surface of the silicon substrate 101 and the silicon substrateremaining portion 147 is formed in the vicinity of the device-formingsurface. The step illustrated in FIG. 12A will be described more indetail as follows.

FIG. 13A and FIG. 13B are cross-sectional views for describing the stepillustrated in FIG. 12A in further detail.

First of all, as shown in FIG. 13A, an SiN film 183 and a photosensitiveepoxy resin film 185 are formed on a back surface of the siliconsubstrate 101 in this sequence. A multi-layered film of the SiN film 183and the photosensitive epoxy resin film 185 correspond to the backsurface insulating film 139 shown in FIG. 1. In a portion of the innerregion of the first insulating ring 130, the SiN film 183 and thephotosensitive epoxy resin film 185 are selectively removed to providean aperture 187, and a tapered surface 145 is formed in these insulatingfilms. Since the use of the photosensitive epoxy resin film 185 providessufficiently lower temperature for the baking operation in thedeposition process, the configuration is suitable for the depositionafter forming the device. Alternatively, a bismaleimide triazine (BT)resin film or the like may be employed for the film that can be formedat relatively lower baking temperature, in place of the photosensitiveepoxy resin film 185.

Then, as shown in FIG. 13B, the portion of the silicon substrate 101remained in the inside of the first insulating ring 130 is etched offthrough a mask of the back surface insulating film 139 to form a throughhole 193, which has a region having a diameter that is larger than thediameter of the aperture 187. In this case, the etch process may beconducted by a plurality of etch steps to form the silicon substrateremaining portion 127 and the silicon substrate remaining portion 147.Alternatively, a portion of the back surface insulating film 139 isutilized as the protruding portion 146 (FIG. 1), which protrudes towardthe inside of the through hole 193 in a direction toward the inside ofthe surface of the substrate from the side wall of the through hole 193.

The through hole 193 is formed by an etch process including multipleetch steps. More specifically, first of all, the silicon substrate 101is dry etched from the back surface thereof so as to provide a geometry(inversely-tapered geometry) of gradually narrowing toward the side ofthe back surface in the vicinity of the back surface thereof, therebyforming the silicon substrate remaining portion 127 having the taperedsurface 128.

Next, a combination of an etchant gas and a deposition gas is employed,so that the etch process is proceeded, while forming a protective filmon the side wall with a deposition gas. This configuration provides theetching in the direction normal to the silicon substrate 101, obtaininga geometry that is vertical to the etched surface. Typical combinationof the etchant gas and the deposition gas in this case may be, forexample, an etchant gas of sulfur hexafluoride (SF₆) and a depositiongas of, for example, octafluoro cyclobutane (C₄F₈), hydrogen bromide(HBr), silicon tetrafluoride (SiF₄) or the like.

Thereafter, the etch process in a transverse direction is proceeded byselecting a reduced amount of the deposition gas in the processconditions described above. This provides the inversely taperedgeometry, thereby forming the silicon substrate remaining portion 147having the tapered surface 148.

Next, as shown in FIG. 12B, the through electrode 129 is formed in thethrough hole 193, and further, the back surface bump 142, which is incontact with the through electrode 129 in the side of the back surface,is formed. The step illustrated in FIG. 12B will be described in detailas follows. FIG. 14A, FIG. 14B, FIG. 15A and FIG. 15B arecross-sectional views, further describing the step of FIG. 12B indetail.

First of all, as shown in FIG. 14A, sputtering processes for Ti and Cuare conducted in this sequence from the side of the back surface to forma Cu/Ti seed 189. In addition to above, in this specification, aconstitution of a multiple-layered structure having an upper layer and alower layer is represented as “upper layer/lower layer (substrateside)”. The Cu/Ti seed 189 is formed on the back surface insulating film139 and on the bottom of the through hole 193.

Then, a photosensitive resist film 191 is formed on the Cu/Ti seed 189.The photosensitive resist film 191 is formed above the back surfaceinsulating film 139 and in the interior of the through hole 193.

Subsequently, as shown in FIG. 14B, the photosensitive resist film 191is selectively remained on the bottom of the through hole 193 byirradiating light diagonally to the normal direction to the siliconsubstrate 101 from the side of the back surface. If the depth of thethrough hole 193 is sufficiently larger, the photosensitive resist film191 can be selectively remained in the bottom of the through hole 193,even if a vertical light irradiation over the wafer surface is conductedwithout employing an oblique exposure. In addition to above, theremained portion of the photosensitive resist film 191 is not shown inFIG. 14B. The Cu/Ti seed 189 is partially removed through a mask of theremained portion of the photosensitive resist film 191 to selectivelyleave a portion of the Cu/Ti seed 189 in the bottom of the through hole193. The portion of the photosensitive resist film 191 remained in thethrough hole 193 is removed, and thereafter, the Cu film 195 is grownvia an electroless plating process. A bottom-up growth of the Cu film195 within the entire through hole 193 can be ensured by employing theelectroless plating process. Consequently, a creation of a void in thethrough electrode 129 can be inhibited. The Cu film 195 is formed toextend from the interior of the through hole 193 to the outside thereof(FIG. 15A).

Further, as shown in FIG. 15B, a back surface grinding process isconducted. This processing provides a planarization of the surface ofthe Cu film 195 and a reduced thickness of the photosensitive epoxyresin film 185 to, for example, about 20 μm. This configuration providesthe through electrode 129, which is in contact with the tapered surface145 and the tapered surface 128 in the vicinity of the back surface andis latched by the protruding portion 146. In this step, a chemicalmechanical polishing (CMP) may alternatively be conducted for the backsurface thereof, in place of the back surface grinding process. In thiscase, mainly on the back surface, portions of the Cu film 195 projectingfrom the resin surface is removed, so that a quantity of the removedphotosensitive epoxy resin film 185 is reduced, thereby reducing thecapacity of the bump over the silicon substrate 101.

Then, returning to the process illustrated in FIG. 12B, a resist film(not shown) is formed on the back surface. The resist film is providedwith an aperture in a position corresponding to the position of thethrough electrode 129 to expose the through electrode 129. Then, the Nifilm 141 and the Au film 143 are sequentially formed by employing, forexample, an electroless plating process to obtain the back surface bump142. The semiconductor device 100 shown in FIG. 1 is obtained by theabove-mentioned procedure.

Next, advantageous effects obtainable by employing the configuration ofthe semiconductor device 100 will be described.

In the structure of the semiconductor device 100, the protruding portion146 contacting with the through electrode 129 is provided in thevicinity of the back surface of the silicon substrate 101. Further,semiconductor device 100 is configured that the through electrode 129can be formed from the back surface of the silicon substrate 101.Consequently, the semiconductor device 100 exhibits an improvedreliability of the device, and, when a stress is exerted over thethrough electrode 129, the protruding portion 146 latches the throughelectrode 129, so that the structure of the semiconductor deviceprevents the through electrode 129 from being fallen off or detachedfrom the side of the back surface.

Further, in the present embodiment, the first insulating ring 130 isprovided so as to surround sides of the through electrode 129.Consequently, an electrical insulation of the periphery of the throughelectrode 129 can be ensured. Thus, a fine pitch arrangement of thethrough electrodes 129 with narrower intervals can be achieved. Further,in the semiconductor device 100, the silicon substrate remaining portion127 and the silicon substrate remaining portion 147 are provided in thevicinity of the back surface of the silicon substrate 101 and in thevicinity of the device-forming surface of the silicon substrate 101,respectively. The region inside of the first insulating ring 130 can bereinforced by remaining a portion of the silicon substrate in the insideof the first insulating ring 130. Consequently, a deterioration of or adamage to the first insulating ring 130 can be inhibited, when a stressis exerted over the through electrode 129 or over the vicinity thereof.

Here, as have been described in reference to FIG. 10, since the firstinsulating ring 130 is a multiple-layered member composed of a pluralityof insulating films, the first insulating ring 130 includes interfacesbetween the insulating films. Consequently, the first insulating ring130 is a member having relatively lower strength. Further, since thethrough electrode 129 is formed via an electroless plating process inthe present embodiment, an adhesiveness between the through electrode129 and the SiN film 131 on the side wall of the through electrode 129is relatively lower.

Therefore, in the present embodiment, a portion of the silicon substrate101 is remained between the first insulating ring 130 and the throughelectrode 129, so that strengths of the first insulating ring 130 and aregion inside thereof is sufficiently ensured. More specifically, theback surface insulating film 139 is provided so as to contact with thesilicon substrate 101, and the silicon substrate remaining portion 127is provided on the inner surface of the first insulating ring 130 so asto contact with the back surface insulating film 139. Further, SiN film103 is provided so as to contact with the silicon substrate 101, and thesilicon substrate remaining portion 147 is provided so as to contactwith the SiN film 103. As such, a reinforcing structure is provided fromthe outer surface of the first insulating ring 130 through the endsurface thereof to the inner side surface, such that, when a stress isconcentrated on a region of the first insulating ring 130, for example,a creation of a crack in the first insulating ring 130 can be inhibited.Further, when a relatively larger force is exerted on the throughelectrode 129 or the first insulating ring 130 in the process forproviding a connection of the back surface bump 142 to an externalelectrode, a deformation of the through electrode 129 or a deteriorationof the first insulating ring 130 can be inhibited.

Further, since the silicon substrate remaining portion 127 and thesilicon substrate remaining portion 147, which function as suchreinforcement member, also function as a portion of the protrudingportion 146 in the present embodiment, a prevention of a falling off ofthe through electrode 129 and a further enhanced strength of the firstinsulating ring 130 are achieved, thereby providing an improvedreliability of the device.

Further, since the first insulating ring 130 is a multi-layered filmcomposed of a plurality of insulating films in the semiconductor device100, a reduction of the capacity can be achieved.

Further, since the first insulating ring 130 includes the SiN film inthe semiconductor device 100, a diffusion of components contained in thethrough electrode 129 can be preferably prevented, even though an innersurface of the through hole 193 is not provided with a barrier film(FIG. 13B) during the formation of the through electrode 129.

Further, in the present embodiment, the first insulating ring 130 is amulti-layered film composed of the SiN film and the SiO₂ film 133. Thisconfiguration provides a reduced dielectric constant of the insulatingfilm, as compared with a case of forming the whole first insulating ring130 with an SiN film. As such, a plurality of functions can be presentedto the first insulating ring 130 by employing a combination of varioustypes of insulating films for materials composing the first insulatingring 130.

Further, the back surface insulating film 139 is provided with theaperture 187 having a diameter smaller than the diameter of the throughelectrode 129, and the side surface of the aperture 187 is formed as thetapered surface 145 in the present embodiment, such that the siliconsubstrate remaining portion 127 can be stably manufactured via an etchprocess in the operations described above in reference to FIG. 12A andFIG. 12B.

In the following embodiments, differences from the first embodiment willbe mainly described.

SECOND EMBODIMENT

FIG. 2 is a cross-sectional view, illustrating a configuration of asemiconductor device of the present embodiment. Fundamentalconfiguration of the semiconductor device shown in FIG. 2 is similar tothe semiconductor device 100 illustrated in FIG. 1, except that: thesilicon substrate remaining portion 147 is not provided; and in thevicinity of the device-forming surface of the silicon substrate 101, theportion of the silicon substrate 101 located in the interior of thefirst insulating ring 130 are all removed, and a Cu film is embedded inthe removed region. More specifically, in FIG. 2, a region of theremained silicon substrate 101 is selectively provided in the vicinityof the back surface of the silicon substrate 101 in a region inside ofthe first insulating ring 130.

Since the protruding portion, which is composed of the tapered surface145 and the silicon substrate remaining portion 127, is also provided atleast in the vicinity of the back surface of the silicon substrate 101in the present embodiment, similar advantageous effects as obtained byemploying the configuration of first embodiment can be also obtained.

Further, when a portion of the silicon substrate 101 inside of the firstinsulating ring 130 is etched off from the side of the back surface inthe process for manufacturing the semiconductor device shown in FIG. 2,it is only necessary to provide at least an etch step for providing thesilicon substrate remaining portion 127, leading to a simplified controlfor the etch condition.

In addition to above, in the semiconductor device shown in FIG. 2, whena dry etch process is conducted for the silicon substrate 101 from theback surface to form the through hole 193, the silicon substrate 101 is,first of all, dry etched from the back surface thereof so as to providea geometry (inversely-tapered geometry) of gradually narrowing towardthe side of the back surface in the vicinity of the back surfacethereof, thereby forming the silicon substrate remaining portion 127having the tapered surface 128.

Next, a combination of an etchant gas and a deposition gas is employed,so that the etch process is proceeded, while forming a protective filmon the side wall with a deposition gas. This configuration provides theetching in the direction normal to the silicon substrate 101, obtaininga geometry that is vertical to the etched surface. Typical combinationof the etchant gas and the deposition gas in this case may be, forexample, an etchant gas of SF₆ and a deposition gas of, for example,C₄F₈, HBr, SiF₄ or the like. Plasma density can be increased byincreasing an radio frequency (RF) power or increasing gas pressure, sothat the etching toward the transverse direction can be enhanced.

THIRD EMBODIMENT

FIG. 3 is a cross-sectional view, illustrating a configuration of asemiconductor device of the present embodiment. Fundamentalconfiguration of the semiconductor device shown in FIG. 3 is similar tothe semiconductor device 100 illustrated in FIG. 1, except that asilicon substrate remaining portion 149 is provided to surround andcovers the entire inner surface of the first insulating ring 130. Thesilicon substrate remaining portion 149 is an annular region, having ageometry, in which an inner diameter thereof is increased from thedevice-forming surface toward the interior of the silicon substrate 101in the vicinity of the device-forming surface of the silicon substrate101, and an inner diameter thereof is increased from the back surfacetoward the interior of the silicon substrate 101 in the vicinity of theback surface.

Since the protruding portion is also provided at least in the vicinityof the device-forming surface and the back surface of the siliconsubstrate 101 in the present embodiment, similar advantageous effects asobtained by employing the configuration of first embodiment can also beobtained.

Further, in the present embodiment, the silicon substrate remainingportion 149 is provided so as to surround the entire interior surface ofthe first insulating ring 130. This provides a configuration, whichincludes a frame composed of silicon provided within the inside of thefirst insulating ring 130. A frame composed of a material, such assilicon and the like, which exhibits higher strength than the firstinsulating ring 130, is provided in the inside of the first insulatingring 130, so that the first insulating ring 130 can be reinforced andprotected from the side of the inner side surface. Thus, when a stressis exerted over the through electrode 129 or in vicinity thereof due toa junction between the back surface bump 142 and the external electrodeor the like, a configuration for providing an inhibition to adeterioration or a failure of the insulating film composing the firstinsulating ring 130 can be presented. Thus, according to the presentembodiment, a falling off of the through electrode 129 is inhibited, anda further improved reliability of the device can be presented.

In addition to above, in the semiconductor device shown in FIG. 3, whenthe silicon substrate 101 is dry etched from the back surface thereof toform the through hole 193, the dry etch process may be conducted whilechanging the etch condition during the etch process, so that the siliconsubstrate 101 can be remained on the entire inner surface of the firstinsulating ring 130 to form the silicon substrate remaining portion 149.For example, at an initial stage of the etch process, the etch processis conducted under an etching condition for forming an inversely taperedstructure by employing a process described in first embodiment, andthereafter, the etching condition is changed to a vertical etchingcondition described in first embodiment. Then, at a stage that aboutone-half of the etch process is progressed, the condition is oncechanged to a condition similar to that for an isotropic etch process, sothat a geometry shown in FIG. 3 is obtained. In order to obtain theetching condition similar to that for the isotropic etch process,deposition gas is reduced, and a bias voltage between an RF source and astage is reduced. This condition allows the isotropic etch process.

FOURTH EMBODIMENT

FIG. 4 is a cross-sectional view, illustrating a configuration of asemiconductor device of the present embodiment. Fundamentalconfiguration of the semiconductor device shown in FIG. 4 is similar tothe semiconductor device 100 illustrated in FIG. 1, except that thesilicon substrate 101 in the entire region inside of the firstinsulating ring 130 is removed to provide a region for forming thethrough electrode 129.

Since the protruding portion 146 formed of the back surface insulatingfilm 139, or more specifically the tapered surface 145, is included inthe vicinity of the back surface of the silicon substrate 101, in thepresent embodiment, similar advantageous effects as obtained byemploying the configuration of first embodiment can be also obtained. Inaddition, since it is only necessary to remove the silicon substrate 101in the entire interior of the first insulating ring 130 in the presentembodiment, it is not necessary to divide the etch process for removingthe silicon substrate 101 into a plurality of steps, thereby providing asimplified etch process.

FIFTH EMBODIMENT

FIG. 5 is a cross-sectional view, illustrating a configuration of asemiconductor device of the present embodiment. Fundamentalconfiguration of the semiconductor device shown in FIG. 5 is similar tothe semiconductor device illustrated in FIG. 4, except that the end ofthe back surface insulating film 139 is not a tapered surface, but asurface parallel to the normal direction to the silicon substrate 101.In addition, in FIG. 5, an annular cylindrical silicon substrateremaining portion 169 is provided in the inside of the first insulatingring 130. Further, the through electrode 129, the silicon substrateremaining portion 169 and the first insulating ring 130 are disposed inthis sequence to form a concentric structure.

In the present embodiment, the back surface insulating film 139protrudes toward the inside of the through electrode 129 beyond theinner surface of the first insulating ring 130, or more specificallyprotrudes toward the inside of the through electrode 129 beyond thesilicon substrate remaining portion 169. Consequently, similaradvantageous effects as obtained by employing the configuration offourth embodiment can also be obtained. In addition, since the siliconsubstrate remaining portion 169 is provided so as to contact with theentire inner side surface of the first insulating ring 130, the regioninside of the first insulating ring 130 can be surely reinforced to moresurely inhibit a deterioration of the first insulating ring 130,similarly as in third embodiment.

SIXTH EMBODIMENT

While the exemplary implementation having the through electrode 129composed of the Cu film is described in the above-mentioned embodiments,the through electrode 129 may alternatively be composed of amultiple-layered member of a plurality of metallic films. FIG. 6 is across-sectional view, illustrating a configuration of a semiconductordevice of the present embodiment. Fundamental configuration of thesemiconductor device shown in FIG. 6 is similar to the semiconductordevice illustrated in FIG. 3, except that the through electrode 129 iscomposed of a nickel (Ni) film 175 and a copper (Cu) film 177, which arestacked from the side of the device-forming surface.

A rate of a growth of the plated film can be increased by utilizing theNi film 175 as a portion of the through electrode 129, as compared withthe case that the whole of the through electrode 129 are presented bythe Cu film 177. Consequently, a manufacturing efficiency can beimproved.

In addition, since the through electrode 129 in the side of the backsurface is composed of the Cu film 177 in the present embodiment, aplanarization of the through electrode 129 via a back surface grindingprocess can be surely conducted.

SEVENTH EMBODIMENT

While the exemplary implementation of having one insulating ringprovided in the periphery of the side surface of the through electrode129 is described in the above-mentioned embodiments, a plurality ofinsulating ring may alternatively be provided. In addition, a pluralityof annular cylindrical insulating film provided in a concentricrelationship may be included, and each of a plurality of annularcylindrical insulating films may be separated via members composed of amaterial that is similar to the material of the semiconductor substrate.

FIG. 7 is a cross-sectional view, illustrating a configuration of asemiconductor device of the present embodiment. FIG. 16 is a plan viewof the semiconductor device shown in FIG. 7. Fundamental configurationof the semiconductor device shown in FIG. 7 and FIG. 16 is similar tothe semiconductor device illustrated in FIG. 3, except the followingaspects.

First, in the semiconductor device of the present embodiment, a secondinsulating ring 150 is provided in the outer concentric relationshipwith the first insulating ring 130. The second insulating ring 150 iscomposed of annular insulating films, which has an inner diameter thatis larger than the outer diameter of the first insulating ring 130, andwhich includes an SiN film 151, an SiO₂ film 153 and an SiN film 155stacked from the inside of the ring toward the outside in this sequence.A silicon substrate remaining region 159, which is presented by aremained portion of the silicon substrate 101, is also included betweenthe first insulating ring 130 and the second insulating ring 150.

According to the present embodiment, a parasitic capacitance in thevicinity of the through electrode 129 can be more effectively reducedwithout having larger film thickness of the insulating film of oneinsulating ring, by providing a plurality of insulating rings.Consequently, the configuration of the present embodiment presents animproved device characteristics and an improved manufacturing stability.

In addition, the through electrode 129 is composed of the Ni film 175and the Cu film 177 in the present embodiment, similarly as theconfiguration described in reference to FIG. 6 in sixth embodiment.However, the Cu film 177 is formed from the inside of the aperture ofback surface insulating film 139 over the outside thereof in the presentembodiment. More specifically, the through electrode 129 and the backsurface bump are integrally molded. This can reduce the numbers of stepsin the manufacturing process.

In addition, the SiN film 157 that covers the circumference of the sidesurface of the through electrode 129 is provided in the presentembodiment. The SiN film 157 functions as a diffusion barrier film forcomponents contained in the through electrode 129. Consequently, theexistence of the SiN film 157 can provide more effective prevention of adiffusion of components contained in the through electrode 129.

In addition to above, in the present embodiment and the followingembodiments, the insulating interlayer 163 corresponds to themulti-layered film of the semiconductor device 100 of first embodimentcomposed of the SiN film 103, the insulating interlayer 105 and theinsulating interlayer 137.

EIGHTH EMBODIMENT

While the configurations, in which the first insulating ring 130 iscomposed of at least three layers of the SiN film 131, the SiO₂ film 133and the SiN film 135, have been exemplified in the above-mentionedembodiments, number of films of the multiple-layered insulating film inthe first insulating ring 130 is not particularly limited, a combinationof a certain number of certain materials may be employed. The presentembodiment illustrates other exemplary implementation of the firstinsulating ring 130.

FIG. 8 is a cross-sectional view, illustrating a configuration of asemiconductor device of the present embodiment. Fundamentalconfiguration of the semiconductor device shown in FIG. 8 is similar tothe semiconductor device 100 illustrated in FIG. 1, except the structureof the first insulating ring 130. The first insulating ring 130 of FIG.8 includes a silicon thermal oxide film 132, the SiN film 131, the SiO₂film 133, the SiN film 135 and a silicon thermal oxide film 134, whichare sequentially stacked from the inside of the ring. More specifically,the first insulating ring 130 of the present embodiment, is configuredto be provided with silicon thermal oxide films outside of the SiN film131 and outside of the SiN film 135 in the first insulating ring 130 ofFIG. 1, respectively. Having such configuration, a dielectric constantof the first insulating ring 130 can be further reduced.

The silicon thermal oxide film 132 and the silicon thermal oxide film134 may be formed by, for example, forming the cylindrical concaveportion as described above in reference to FIG. 9A, and then conductinga thermal oxidation for the surface of the concave portion.

In addition, alternative configurations provided with two insulatingrings outside of the through electrode 129 are shown in FIG. 17 to FIG.19. FIG. 17 to FIG. 19 are cross-sectional views, illustrating thealternative exemplary implementations of the semiconductor devices.

In FIG. 17, the through electrode 129 is composed of the Ni film 175 andthe Cu film 177. As a rate of an electroless nickel (Ni) plating processis faster than a rate of an electroless copper (Cu) plating process, theregion in the side of the device-forming surface of the throughelectrode 129 is designed to be composed of the Ni film 175, so that arate of embedding a metallic film composing the through electrode 129 isincreased, thereby providing a further improved manufacturingthroughput. In addition to above, in FIG. 17, a Cu/Ti bump 235 serves asthe back surface bump.

In addition, in FIG. 17, an SiO₂/SiN/SiO₂ film 213 is provided in thecircumference of the side surface of the through electrode 129.Consequently, a parasitic capacitance generated between the throughelectrode 129 and the silicon substrate remaining portion 149 can befurther reduced, as compared with the configuration shown in FIG. 7 ofthe seventh embodiment that is provided with the SiN film 157.

In addition, the device shown in FIG. 17 includes the first insulatingring 130, which has an SiO₂/SiN/SiO₂ film 201, a polycrystalline siliconfilm 203 and an SiO₂/SiN/SiO₂ film 205 that are stacked in this sequencefrom the inside of the annulus toward the outside thereof. Similarly,the device includes the second insulating ring 150, which has anSiO₂/SiN/SiO₂ film 207, a polycrystalline silicon film 209 and anSiO₂/SiN/SiO₂ film 211 that are stacked in this sequence from the insideof the annulus toward the outside thereof. As such, the polycrystallinesilicon film, which serves as an electroconductive film, may be providedin the first insulating ring 130 and the second insulating ring 150. Animproved filling capability in the insulating ring can be presented byproviding the polycrystalline silicon film.

In addition to above, concerning FIG. 17, two-dimensional geometries ofthe through electrode 129 and the first insulating ring 130 may be, forexample, configured of the element shown in FIG. 20.

In addition, the through electrode 129 may be composed of a plurality ofelectrodes extending through the silicon substrate 101. Morespecifically, a plurality of through electrodes may be provided in theinside of the first insulating ring 130. FIG. 18 and FIG. 19 arecross-sectional views illustrating such configuration.

In FIG. 18, the through electrode 129 is composed of two polycrystallinesilicon films 225 in cross sectional view. Side surfaces of therespective polycrystalline silicon films 225 are covered with SiO₂ films227 to provide insulations from the silicon substrate remaining portion149. The polycrystalline silicon film 225 has a geometry, in whichdiameter thereof is decreased from the device-forming surface toward theback surface in the vicinity of the back surface of the siliconsubstrate 101.

In addition, the first insulating ring 130 is composed of an SiO₂ film219, the polycrystalline silicon film 203 and an SiO₂ film 221 that arestacked in this sequence from the inside of the annulus toward theoutside thereof. Further, the second insulating ring 150 is composed ofan SiO₂ film 215, the polycrystalline silicon film 209 and the SiO₂ film217 that are stacked in this sequence from the inside of the annulustoward the outside thereof.

In FIG. 18, in one side of each of the polycrystalline silicon films225, the back surface insulating film 139 and the SiO₂ film 227 projectsto a side of the polycrystalline silicon film 225. In this case, afalling off of the polycrystalline silicon film 225 can also beinhibited. Further, in FIG. 18, the silicon substrate remaining portion149 exists to fill the spaces between a plurality of polycrystallinesilicon films 225. The silicon substrate remaining portion 149 has atapered portion, which gradually broadens from the device-formingsurface of the silicon substrate 101 toward the back surface thereof. ACu/Ti/Al bump 223 that serves as a back surface bump contacts with thesilicon substrate remaining portion 149, and also contacts with aplurality of polycrystalline silicon films 225. Consequently, the regionbetween the polycrystalline silicon films 225 are reinforced by thesilicon substrate remaining portion 149 and the Cu/Ti/Al bump 223.

Further, polycrystalline silicon is selected as the material for thethrough electrode 129, so that simultaneous formation of the firstinsulating ring 130 and the second insulating ring 150 can be achieved.Further, an aluminum (Al) film may be employed in the side of thesilicon substrate 101 of the back surface bump to provide an improvedohmic property with the polycrystalline silicon film 129.

Fundamental configuration of the semiconductor device shown in FIG. 19is similar to the semiconductor device illustrated in FIG. 18, exceptthat the SiO₂ film 219 is not isolated from the SiO₂ film 221 in theside of the back surface of the silicon substrate 101, and instead, acontinuous and integral SiO₂ film 233 is provided. Similarly, acontinuous and integral SiO₂ film 231 is provided, in place of the SiO₂film 215 and the SiO₂ film 217. While polycrystalline silicon isemployed for the material composing the first insulating ring 130 andthe second insulating ring 150 in the device of FIG. 19, narrower bodiesmay alternatively be employed for these insulating rings, and only onelayer, which is not to be filled with an insulating film (SiO₂ film),may be filled with a polycrystalline silicon film, as an electroconductivity is not required for the ring. This alternativeconfiguration provides narrower intervals between the through electrodes129.

Further, similarly as in the device shown in FIG. 18, a plurality ofpolycrystalline silicon electrodes are employed, in place of employingthe single through electrode 129 in the device shown in FIG. 19, so thatan improvement in the filling capability of the through electrode and areduced resistance can be simultaneously achieved.

In addition to above, concerning FIG. 19, two-dimensional geometries ofthe through electrode 129 and the first insulating ring 130 may be, forexample, configured of elements shown in FIG. 21. As shown in FIG. 21,in place of the through electrode 129, four independent electrodescomposed of the polycrystalline silicon film 225, for example, may beemployed.

Further, in the above-described embodiments, a barrier film forpreventing a diffusion of a metal can be provided in a predeterminedlocation. The barrier film may be an insulating film or may be anelectroconductive film. Typical insulating film may be a film containingnitrogen such as an SiN film or an SiCN film, and typicalelectroconductive film may be a film, which can be utilized forcomposing the interconnect metal such as a barrier metal film and thelike.

FIG. 24 to FIG. 26 are cross-sectional views, illustrating anarrangement constitution of the barrier film.

Fundamental configuration of the semiconductor device shown in FIG. 24is similar to the semiconductor device illustrated in FIG. 17, exceptthat the device does not include the second insulating ring 150 butincludes an SiN film 241.

The barrier film is formed at least within the inside of the firstinsulating ring 130 and in the side of the device-forming surface and inthe side of the back surface of silicon substrate 101. This barrier filmis composed of an SiN film provided in the side of the device and an SiNfilm provided in the side of the back surface serving as a back surfaceinsulating film 139.

Further, a predetermined region of the silicon substrate 101 is removed,and the predetermined removed region is provided with a first insulatingring 130 and a through electrode 129, and a region formed of a remainedportion of the silicon substrate 101 is provided between a region forforming the annular cylindrical insulating film 130 and a region forforming the through electrode 129, and the device-forming surface sidein the region of the through electrode 129, the region of the firstinsulating ring 130 and the region where the silicon substrate areremained are covered with a barrier film for preventing a diffusion of ametal. Further, a barrier film covers the device-forming surface sideand the back surface side of the silicon substrate 101 from the regionfor forming the through electrode 129 over the region for forming thefirst insulating ring 130.

Since the portion for forming the transistor is isolated by the barrierfilm according to the above-described configuration, a deterioration inthe device performance can be prevented, even if a contamination ofmetal is occurred when the etching of silicon is conducted from the backsurface thereof or when the inside of the through hole is filled withmetal.

Further, the first insulating ring 130 is provided in the circumferenceof the side surface of the through electrode 129, which is composed ofan Ni film 175 and a Cu film 177, and extends through the siliconsubstrate 101, and includes at least single layer of barrier film, whichis capable of preventing a diffusion of a metal. This barrier film is anSiN film, which is a part of a combined film: SiO₂/SiN/SiO₂ film 201 anda part of a combined film: SiO₂/SiN/SiO₂ film 205.

In FIG. 25, a semiconductor element (not shown) and an electroconductivecontact plug (not shown) coupled to the semiconductor element areprovided on the device-forming surface of the silicon substrate 101. Thecontact plug coupled to the semiconductor element is provided in thesame level as the through electrode connecting plug 117. Further, theconfiguration in FIG. 25 shows that, above the side of the devicesurface of the annular cylindrical insulating film, a ring-shapedcontact interconnect (seal ring 243) is provided in the same level asthe contact plug. The seal ring 243 is provided in the same layer thatalso includes the through electrode connecting plug 117 and the contactplug coupling to the semiconductor element, and is formed simultaneouslywith forming these plugs.

The configuration shown in FIG. 25 has, more specifically, substantiallythe same configuration as the configuration FIG. 24 has, except that aring interconnect (seal ring 243) of tungsten, which is formedsimultaneously with forming the contact plug, is formed on the firstinsulating ring 130. The seal ring 243 is provided so as to contact withthe upper portion of the first insulating ring 130, and is composed of,for example, a tungsten film.

Further, the SiN film 241 functioning as a barrier film is formed on theseal ring 243. In this case, the SiN film 241 is formed immediatelyabove the seal ring 243. The SiN film 241 is provided so as to contactwith the upper portion of contact plug coupling to the semiconductordevice and the upper portion of the seal ring 243. The SiN film 241 isprovided in the entire interior of the region for forming the seal ring243 to cover the upper portion of the insulating interlayer thatincludes the seal ring 243 and the contact plug embedded therein. Morespecifically, the upper portions of the through electrode 129, thecombined film SiO₂/SiN/SiO₂ 213 and the combined film SiO₂/SiN/SiO₂ 201and at least a portion of the upper portion of the polycrystallinesilicon film 203 are covered with the SiN film 241.

In such a configuration, the portion for forming the transistor isisolated from the through electrode by the presence of the barrier film,the interconnect metal and the polysilicon film, so that a concern ofbeing contaminated with metal can be avoided. In such configuration, anissue of a metal contamination is not caused by the presence of thetungsten ring and the barrier film, even if the silicon is over etchedto etch an interconnect interlayer film in the side of the devicesurface, when the silicon is etched from the back surface thereof.

The configuration in FIG. 26 shows that a ring of another metallicinterconnect is provided immediately above of the ring interconnectcomposed of tungsten shown in FIG. 25.

In FIG. 26, a ring-shaped metallic interconnect (ring-shapedinterconnect 247) is further provided so as to contact the upper portionof the seal ring 243. Further, a barrier film (SiN film 241) forpreventing a diffusion of metal is provided so as to contact with theupper portion of the ring-shaped interconnect 247.

In addition to above, when Cu is employed for a metallic interconnectsuch as the seal ring 243, the ring-shaped interconnect 247 and the likeor a through electrode connecting plug 117 in the configurations shownin FIG. 24 to FIG. 26, a metallic barrier film such as tantalum (Ta),tantalum nitride (TaN), tungsten nitride (WN), titanium nitride (TiN) orthe like is be formed, prior to forming Cu. Further, an insulatingbarrier film is formed on the Cu interconnect. A material such as SiN,SiCN and the like may be employed for the insulating barrier film. Theconfiguration including the Cu interconnect and the W plug, and thebarrier film on the Cu interconnect is a general configuration for alarge scale integrated circuit (LSI) that employs a damascene Cuinterconnect, and an issue of causing a metal contamination resultedfrom the formation of the through electrode can be avoided, withoutintroducing an additional process.

FIG. 28 and FIG. 29 are cross-sectional views, illustrating yet otherexample of a semiconductor device. A configuration in FIG. 28 shows thatthe through electrode shown in FIG. 26 is directly connected to aninterconnect of a LSI. In FIG. 28, the through electrode is formed topenetrate through the Si substrate from the back surface thereof, andeventually be coupled to an underlying interconnect of the LSI. Suchthrough electrode is mainly prepared via a nickel (Ni) electrolessplating process, and further a gold (Au) plating process is conducted,and eventually formed to be an integrated with a back surface bump.

The LSI interconnect connectd to the through electrode may be in a formof either a single interconnect, or a multiple interconnects. When thecoupling is made to multiple interconnects, a necessary linewidth of asingle interconnect in the multiple interconnects can be reduced,thereby providing an improved consistency with the LSI interconnectprocess. Further, while the side wall of the through electrode is incontact directly with Si, an electrical insulation is ensured by theannular cylindrical insulating film. While Ni is employed for thematerial of the through electrode in this embodiment, any electricallyconductive materials, which is inert with Si, may also be employed. Forexample, after the through hole is formed, an electroconductive pastemay be embedded therein to form an through electrode.

FIG. 29 illustrates an exemplary implementation, in which the throughelectrode shown in FIG. 28 penetrates through an insulating film betweenM1 underlying interconnects and reaches to a M2 interconnect. When themultiple interconnects are employed for the M1 interconnect coupled tothe through electrode, an insulating film between the interconnects maybe possibly dropped off therefrom during an etch process, and acontamination of a metal due to such dropping off can be prevented bydisposing the M2 interconnect and a ring via surrounding such region. Itmay be further preferable that the M2 ring interconnect and the ring viaare formed immediately above the M1 ring interconnect.

Alternatively, in place of the through electrode 129, a stripe-patternedpolycrystalline silicon film may alternatively be employed. FIG. 22,FIG. 23 and FIG. 27 are plan views illustrating such configurations.

In FIG. 22, the through electrode is composed of one continuous andintegral polycrystalline silicon film 225. The polycrystalline siliconfilm 225 is composed of a loop region and connecting regions forconnecting two different portions of the annulus. In FIG. 22, atwo-dimensional geometry of the annular region is a square, and theregions for connecting the annulus to form double cross pattern areprovided. Further, silicon substrate remaining portions 229 are includedin the inside of the connecting region. A two-dimensional geometry ofthe silicon substrate remaining portion 229 is also a square. Sidesurfaces of the polycrystalline silicon films 225 are coated with theSiO₂ films 227. Further, side surfaces of the silicon substrateremaining portions 229 are also coated with the SiO₂ films 227. Morespecifically, the silicon substrate remaining portion 229 is insulatedfrom the polycrystalline silicon film 225 via the SiO₂ film 227. Here,the term “annular” further contains a square or a rectangular loop, inaddition to a circular loop.

According to the configuration of the device shown in FIG. 22, theregion for forming the polycrystalline silicon film 225 is madeslit-like, so that the filling capability therein can be improved.

Alternatively, the configuration of the device shown in FIG. 23 includesthe configuration of the device shown in FIG. 22, except that crisscrossintersections in the connecting region does not exist, and the siliconsubstrate remaining portion 229 is patterned to form a diagonal latticepattern. In the device shown in FIG. 23, the polycrystalline siliconfilm 225 is only composed of slit-shaped regions and T-shapedintersections. Consequently, filling capability within thepolycrystalline silicon film 225 can be further improved. In addition,since the etching is easily proceeded at intersections of the slit, thewidth of the etched trench is increased, and therefore voids may beeasily generated after the filling process. On the contrary, accordingto the configuration of FIG. 23, a generation of such voids can beinhibited.

FIG. 27 is a diagram, illustrating a configuration of a hexagonalsilicon substrate remaining portion 229. In FIG. 27, intersections ofslits in polycrystalline silicon film 225 are provided to form anintersecting angle, which is larger than the intersecting angle of theabove-described T-shaped intersection. Consequently, etch uniformityaround the intersection can be further improved, and therefore a fillingcapability for the polycrystalline silicon film 225 can be furtherimproved.

Preferable embodiments of the present invention have been described. Itshould be understood that it is not intended to limit the scope of thepresent invention to these embodiments described above, and it isobvious for a person having ordinary skills in the art that theembodiments described above may be modified without departing from thescope of the present invention.

For example, while the configuration that the through electrode 129contacts with the through electrode connecting plug 117 at their endsurfaces is exemplified in the above embodiments, the end of the throughelectrode connecting plug 117 may alternatively be buried within thethrough electrode 129. This can ensure further close contact between thethrough electrode 129 and the through electrode connecting plug 117 viaan anchor effect, thereby providing a further effective prevention froma falling off of the through electrode 129. In addition, this canprovide an increased contact area between the through electrode 129 andthe through electrode connecting plug 117, thereby providing furtherreduced contact resistance therebetween.

In addition, while the cohesive agent layer 179 and the support 181 arestripped from the device-forming surface of the silicon substrate 101 inthe above embodiments, these may be served as a portion of thesemiconductor device without stripping from the device-forming surfaceof the silicon substrate 101 as required.

It is apparent that the present invention is not limited to the aboveembodiment, that may be modified and changed without departing from thescope and spirit of the invention.

1. A semiconductor device, comprising: a semiconductor substrate; athrough electrode extending through said semiconductor substrate; anannular cylindrical insulating film, being provided in a circumferenceof a side surface of said through electrode and extending through saidsemiconductor substrate; and a protruding portion provided separatelyfrom said through electrode and provided separately from said annularcylindrical insulating film at least in the vicinity of a back surfaceof a device-forming surface of said semiconductor substrate so as tocontact with said through electrode, and protruding in a direction alongthe surface of said semiconductor substrate toward an interior of saidthrough electrode and protruding concentrically through saidsemiconductor substrate, said protruding portion not completely coveringthe back surface of said through electrode and extending only partiallythrough the substrate.
 2. The semiconductor device according to claim 1,wherein at least a portion of said protruding portion is composed of aninsulating material.
 3. The semiconductor device according to claim 2,further comprising a back surface insulating film provided so as tocontract with said back surface, wherein said back surface insulatingfilm composes at least a portion of said protruding portion.
 4. Thesemiconductor device according to claim 1, wherein a predeterminedregion of said semiconductor substrate is removed and said removedpredetermined region is provided with said annular cylindricalinsulating film and said through electrode, and a region formed of aremained portion of said semiconductor substrate is provided between aregion for forming said annular cylindrical insulating film and a regionfor forming said through electrode.
 5. The semiconductor deviceaccording to claim 4, wherein at least a portion of said protrudingportion is composed of a region formed of a remained portion of saidsemiconductor substrate.
 6. The semiconductor device according to claim5, wherein said region formed of the remained portion of saidsemiconductor substrate is provided so as to surround the entireinterior side surface of said annular cylindrical insulating film. 7.The semiconductor device according to claim 1, wherein said annularcylindrical insulating film includes a plurality of insulating filmsdeposited to form a concentric cylinder.
 8. The semiconductor deviceaccording to claim 1, wherein said through electrode has a diameterdecreasing toward said device-forming surface, in the vicinity of saiddevice-forming surface.
 9. The semiconductor device according to claim1, wherein said through electrode has a diameter increasing toward saiddevice-forming surface, in the vicinity of said back surface.
 10. Thesemiconductor device according to claim 1, wherein a plurality of saidthrough electrode are provided in the interior of said annularcylindrical insulating film.
 11. The semiconductor device according toclaim 1, further comprising an annular cylindrical insulating film,being provided in a circumference of a side surface of said throughelectrode, extending through said semiconductor substrate, andcontaining at least single layer of a barrier film that is capable ofpreventing a diffusion a metal.
 12. The semiconductor device accordingto claim 11, wherein a predetermined region of said semiconductorsubstrate is removed and said removed predetermined region is providedwith said annular cylindrical insulating film and said throughelectrode, and a region formed of a remained portion of saidsemiconductor substrate is provided between a region for forming saidannular cylindrical insulating film and a region for forming saidthrough electrode, and wherein a region formed of remained portions ofsaid through electrode, said annular cylindrical insulating film andsaid semiconductor substrate in the side of the device-forming surfaceare covered with a barrier film that prevents a diffusion of metal. 13.The semiconductor device according to claim 11, wherein a semiconductordevice and an electroconductive contact plug coupled to saidsemiconductor device are provided on the device-forming surface of saidsemiconductor substrate, and a ring-shaped contact interconnect isprovided above the side of the device surface of said annularcylindrical insulating film so as to be located in the same level assaid contact plug.
 14. The semiconductor device according to claim 13,wherein a barrier film that prevents a diffusion of metal is provided soas to contact with an upper portion of said contact plug and an upperportion of said ring-shaped contact interconnect.
 15. The semiconductordevice according to claim 13, wherein a ring-shaped metallicinterconnect is further provided so as to contact with the upper portionof said ring-shaped contact interconnect.
 16. The semiconductor deviceaccording to claim 15, wherein a barrier film that prevents a diffusionof metal is provided so as to contact with the upper portion of saidring-shaped metallic interconnect.
 17. A semiconductor device,comprising: a semiconductor substrate; a through electrode extendingthrough said semiconductor substrate; an annular cylindrical insulatingfilm, being provided in a circumference of a side surface of saidthrough electrode and extending through said semiconductor substrate;and a protruding portion provided on at least in the vicinity of a backsurface of a device-forming surface of said semiconductor substrate soas to contact with said through electrode and protruding in a directionalong the surface of said semiconductor substrate toward an interior ofsaid through electrode, wherein a predetermined region of saidsemiconductor substrate is removed and a portion of said removedpredetermined region is provided with said annular cylindricalinsulating film and said through electrode, and a region formed of aremained portion of said semiconductor substrate is provided between aregion for forming said annular cylindrical insulating film and a regionfor forming said through electrode.
 18. The semiconductor deviceaccording to claim 17, wherein at least a portion of said protrudingportion is composed of a region formed of a remained portion of saidsemiconductor substrate.